Current status of China's lithography equipment development: EUV
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Current status of China's lithography equipment development: EUV
While China's Ministry of Industry and Information Technology (MIIT) recently announced updates on deep ultraviolet (DUV) lithography, Shanghai Micro Electronics Equipment (SMEE) also disclosed its 2023 patent applications related to extreme ultraviolet (EUV) technology, along with the publication of patents filed in September 2024.
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